EMS TURBO SPUTTER PDF

The EMS R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8″/ mm (e.g. a wafer). The EMST S Plus is a high resolution sputter coater for oxidizing and non- oxidizing The EMS T Plus product line is a compact turbomolecular- pumped. EMS T Turbo-Pumped Sputter Coater/Carbon Coater. The EMST is a compact turbomolecular- pumped coating system suitable for SEM,. TEM and many.

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The EMS T Plus is optimized for use with a turbomolecular pump, sputtter gives a lower vacuum down to 5 x 10 -5 mbar. This enables the sputtering of oxidizing metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering sputfer for high purity, amorphous carbon films of high density. Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process. System prompts user to confirm target material and it then automatically selects appropriate parameters for that material. Intuitive software allows the most inexperienced or occasional operator to rapidly eks and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Careful evaporation allows precise control of carbon thickness with or without the optional film thickness monitor. e,s

The quality of the resulting carbon films is also enhanced by the eradication of “sparking” that is a common feature of less advanced coaters. For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard. Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation.

Turbo-Pumped Sputter and Carbon Coater

However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample.

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The EMS T Plus series uses low temperature enhanced-plasma magnetrons optimized for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated. Others are available on request. This allows the user to configure the system as a sputter coater, evaporator or glow discharge system — all in one space saving format. A carbon cord evaporation insert is available as an option.

Automatic detection of the head type when changed. Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples.

Tall chamber option is available for carbon evaporation to avoid sample heating, improved uniformity for sputtering and to hold taller samples. All are easy-change, drop-in style no screws and are height adjustable except for the rotary planetary stage.

A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

All are easy-change, drop-in style no screws and are height adjustable except rotary planetary stage:. Electron Microscopy Sciences specializes in the manufacturing, preparation and distribution of the highest quality laboratory chemicals and microscopy supplies and equipment for electron microscopy, light microscopy, and histology.

NanoSurface Cytostretcher Cell Stretcher. Overview Platforms Workstations Isolation Platforms. Email Newsletter Be the first to learn about new products for your laboratory and product specials. Home Online Catalog of Microscopy Products. Full graphical interface with touch screen buttons. Includes features such as a log of the last coatings and reminders for when maintenance is due. T S and T ES versions only.

Other stages available on request. Hydraulically-formed bellows stainless-steel backing line. Sputter current mA to a predetermined thickness with optional FTM or by the built-in timer. The maximum sputtering time is 60 minutes without breaking vacuum and with automatically built-in cooling periods. Thermal evaporation of metals from filaments or boats. For cleaning TEM apertures, a standard molybdenum boat supplied can be fitted. High resolution turbomolecular pumped capacitive touch-screen controlled sputter coater with status LED indicator, including quick release sputter insert and one 57 mm diameter x 0.

Rotating specimen stage, 50 mm diameter, supplied as standard. Fitted with a carbon rod evaporation head for 3.

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Supplied with carbon rods 3.

The deposition heads can be swapped in seconds and the intelligent system logic automatically recognizes which head is in place and displays the appropriate operating settings.

Consists of high resolution turbomolecular pumped capacitive touch-screen controlled sputter coater and carbon evaporator with status LED indicator, including quick release sputter insert and one 57 mm diameter x 0.

Coating inserts are interchangeable. A “dry” alternative to the standard oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter.

Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54 mm x 0. For additional targets see Sputyer Targets section. Carbon rod evaporation head insert for 6. Note that EMS recommends 3.

Turbo-Pumped Sputter Coater, EMST S – Science Services

Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards T E and T ES versions only. Supplied with a pack of ten tungsten filaments and a molybdenum boat.

Extended height vacuum chamber mm high — the standard chamber is mm high. For increased source to sample distance and for coating large specimens. Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS T Plus when bench depth is limited. Film thickness monitor FTM attachment. Consists of a built in chamber mounted quartz crystal oscillator includes crystal.

As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited.

Full range vacuum gauge for low and high vacuum measurement a low vacuum Pirani gauge is fitted as standard. Glow discharge insert to modify surface properties e. This stage only rotates — no tilt or height adjustment.

Rotate-tilt specimen stage with adjustable tilt up to 90 degrees and height 37 mm mm. Tilt angle can be preset. Stage rotation speed variable between 8 and 20rpm. Has six stub positions for 15 mm or 6. Rotating specimen stage for glass microscope slides up to two x 75 mm x 25 mm slides. Includes gear box to allow sputteer FTM to be used.